M. Braic, V. Braic, M. Balaceanu, A. Kiss, C. Cotrut, P. Drob, A. Vladescu, C. Vasilescu, On some characteristics of Ti oxynitrides obtained by pulsed magnetron sputtering, Plasma Process Polym., 4 (2007) S171-S174

Title: On some characteristics of Ti oxynitrides obtained by pulsed magnetron sputtering

Abstract: TiOxNy coatings were investigated as possible candidates for ion diffusion barrier layers. The elemental and phase composition, texture, hardness, adhesion, and corrosion resistance of the coatings were analyzed. The ion release in Ringer solution for uncoated and coated samples was also determined. The film properties were found to significantly depend on the reactive gas composition (O2/N2 ratio). The coatings proved to enhance the corrosion protection and to reduce the ion release of the uncoated specimens.

Key words: corrosion resistance; hardness; pulsed magnetron deposition; TiOxNy coatings