M. Braic, V. Braic, M. Balaceanu, G. Pavelescu, A. Vladescu, Plasma deposition of alternate TiN/ZrN multilayer hard coatings, Journal of Optoelectronics and Advanced Materials, 5/5 (2003) 1399-1404

Title: Plasma deposition of alternate TiN/ZrN multilayer hard coatings

Abstract: Microchemical, microstructural, mechanical and tribological characteristics of alternate TiN/ZrN multilayer coatings were investigated by energy-dispersive X-ray (EDX) spectroscopy, X-ray diffraction (XRD), microhardness and thickness measurements, adhesion and wear resistance tests. The Coatings., with various bilayer periods and thicknesses of the individual layers, were deposited on Si and steel substrates by the cathodic are technique. A comparison with TiN and ZrN monolayer properties was carried out.

Keywords: alternate multilayer coatings; TiN and ZrN; cathodic arc method

Author: M. Braic